منابع مشابه
Pattern transfer using block copolymers.
To meet the increasing demand for patterning smaller feature sizes, a lithography technique is required with the ability to pattern sub-20 nm features. While top-down photolithography is approaching its limit in the continued drive to meet Moore's law, the use of directed self-assembly (DSA) of block copolymers (BCPs) offers a promising route to meet this challenge in achieving nanometre featur...
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ژورنال
عنوان ژورنال: Materials Today
سال: 2010
ISSN: 1369-7021
DOI: 10.1016/s1369-7021(10)70083-3